Share Email Print
cover

Proceedings Paper • new

Highly sensitive terahertz-wave arrayed detector using InAs-HEMT on glass for video-imaging application
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

This paper presents a newly developed square law detector array whose NEP is as low as ~ 1 pW/Hz0:5 for 1.0 THz waves. The detector array using high electron mobility transistor (HEMT) with InGaAs/InAs/InGaAs double hetero-structured channel has been fabricated. The InAs-HEMT was fabricated on a quartz substrate using the layer transfer technology. Also, an array of square law detectors was developed by applying advanced selective etching, atomic layer deposition, and metallization to the transferred hetero-structured layers. The static analysis revealed that the transistor shows electron mobility as high as 3,200 cm2/Vs and low leakage with subthreshold slope as low as ~ 100 mV/dec. Detection performance was characterized by directly inputting 1.0 THz waves thorough a THz probe to each of the arrayed detectors. It is also demonstrated that the detection characteristics were well described by the analytical formulae derived from the channel-carrier behavior model. The experimental results suggested that the developed detector array is a promising candidate for imaging application.

Paper Details

Date Published: 1 March 2019
PDF: 7 pages
Proc. SPIE 10917, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII, 109170Y (1 March 2019); doi: 10.1117/12.2510794
Show Author Affiliations
Hiromu Kojima, Kyushu Univ. (Japan)
Daishi Kido, Kyushu Univ. (Japan)
Haruichi Kanaya, Kyushu Univ. (Japan)
Hiroyuki Ishii, National Institute of Advanced Industrial Science and Technology (Japan)
Tatsuro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)
Eiji Kume, IR Spec Corp. (Japan)
Mutsuo Ogura, IR Spec Corp. (Japan)
Tanemasa Asano, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 10917:
Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XII
Laurence P. Sadwick; Tianxin Yang, Editor(s)

© SPIE. Terms of Use
Back to Top