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Influence of numerical aperture (NA) on micro-reflectance spectroscopy
Author(s): Xinhua Pan; Nassim Rahimi; Alain Price; Askari Ghasempour; Francis C. Ndi
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Paper Abstract

Micro-reflectance (μ-R) spectroscopy is a powerful technique for investigating the micro-scaled surfaces and interfaces, such as semiconductors, metals, etc. We discuss and compare the μ-R spectroscopy on specular (Si wafer) and scattering (MoS2 flake) surfaces using various objectives with different NA. μ-R is calculated by the ratio of sample to reference spectra, it follows the sequence of NA on scattering surface, which is proven by larger NA showing better performance for scattered irradiance due to its wider collection angle. Micro-reflectance difference (μ-RD) of each wavelength is further calculated, and it’s 30 times larger on scattering MoS2 flake surface than specular Si wafer surface.

Paper Details

Date Published: 4 March 2019
PDF: 6 pages
Proc. SPIE 10925, Photonic Instrumentation Engineering VI, 109250S (4 March 2019); doi: 10.1117/12.2510619
Show Author Affiliations
Xinhua Pan, HORIBA Scientific (United States)
Nassim Rahimi, HORIBA Scientific (United States)
Alain Price, HORIBA Scientific (United States)
Askari Ghasempour, HORIBA Scientific (United States)
Francis C. Ndi, HORIBA Scientific (United States)


Published in SPIE Proceedings Vol. 10925:
Photonic Instrumentation Engineering VI
Yakov G. Soskind, Editor(s)

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