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Flexible femtosecond processing with programmable light modulators (Conference Presentation)
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Paper Abstract

Translating the high available power for current industrial lasers in the 100 to 500 W range into high throughput micro-processing is of high importance for future industrial applications. High repetition rates and/or high energies can lead to detrimental thermal effects on the sample and degrade the process quality even using ultrafast lasers. New processing strategies are therefore required to take full advantage of the laser available power. Programmable spatial light modulators (SLM) can bring flexibility while maintaining a high spatial resolution compatible with complex optical functions like multi spots or user defined beam profiles. They enable specific laser characteristics, that can change during the process. The recent technological progress in LCOS based systems, enables high optical transmission greater than 95 %, but also high average power handling up to at least 100 W of laser power. However, the dependence of SLM shaping performance on laser bandwidth places specific requirement when using ultrafast lasers. We will present phase map optimization strategies dedicated to specific industrial applications.

Paper Details

Date Published: 13 March 2019
Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 109050B (13 March 2019); doi: 10.1117/12.2510426
Show Author Affiliations
Eric Audouard, Amplitude Systèmes (France)
Eric Mottay, Amplitude Systèmes (France)
Martin Delaigue, Amplitude Systèmes (France)
Axel Chambinaud, Amplitude Systèmes (France)
Konstantin Mishchik, Amplitude Systèmes (France)
Clemens Hönninger, Amplitude Systèmes (France)
Benjamin Dusser, QiOVA (France)
Yoan Di Maio, QiOVA (France)
Sébastien Landon, QiOVA (France)

Published in SPIE Proceedings Vol. 10905:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Tetsuya Makimura; Gediminas Račiukaitis; Carlos Molpeceres, Editor(s)

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