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Subtractive 3D printing glass by SLE: Applications and combination with ultrafast laser glass welding (Conference Presentation)
Author(s): Jens Gottmann; Martin Hermans; Jürgen Ortmann
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Paper Abstract

By internal modification of transparent glasses and crystals with ultrafast laser radiation and subsequent wet-chemical etching (here named SLE = selective laser-induced etching), very precise 3D structures have been produced, especially in quartz glass (fused silica), for more than a decade. By the combination of a high precision three-axis system to move the glass sample and a fast 3D beam steering system to move the laser focus, the SLE process is now suitable to produce more complex structures in a shorter time [1]. We have programmed a printer driver for commercial CAD software and the flexible machine software enabling automated production of complex 3D glass parts with the LightFab 3D Printer. Some examples of 3D precision glass parts e.g. for lab-on-a-chip applications (cell-sorting microfluidics), electronics (glass via and connectors), semiconductor (quartz chucks), optics and precision mechanics are presented. The SLE process is very scalable for high throughput since a faster writing speed results in higher selectivity and thus larger precision of the resulting structures. Thus SLE is a process which is suitable for mass production of 3D structures in glasses. Some examples of rapidly produced structures using our high speed beam deflection modules are demonstrated, which are the basis of our special machines enabling mass-production. Since the LightFab 3D Printer includes an ultrafast laser with programmable pulse duration and variable repetition rates also other in-volume processes than SLE like 2-photon-polymerization, direct writing of waveguides in glasses, internal glass welding can be done in the same machine. As example of process chains the combination of SLE with glass welding by ultrafast laser radiation will be shown. [1] J. Gottmann, M. Hermans, N. Repiev, J. Ortmann (2017) Selective Laser-Induced Etching of 3D Precision Quartz Glass Components for Microfluidic Applications—Up-Scaling of Complexity and Speed, Micromachines 8, pp. 110-120

Paper Details

Date Published: 4 March 2019
Proc. SPIE 10908, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX, 109080D (4 March 2019); doi: 10.1117/12.2510054
Show Author Affiliations
Jens Gottmann, LightFab GmbH (Germany)
Martin Hermans, LightFab GmbH (Germany)
Jürgen Ortmann, LightFab GmbH (Germany)

Published in SPIE Proceedings Vol. 10908:
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX
Peter R. Herman; Michel Meunier; Roberto Osellame, Editor(s)

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