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Diffractive optical elements investigation in the phase domain
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Paper Abstract

In this work we demonstrate the advantages of investigating diffractive optical elements in the phase domain. In this regime we can detect features that are not restrained by the diffraction limit and relate them to the geometrical and optical properties of the sample under test. To accomplish that, we use the custom made spectral high resolution interference microscope. Phase map recordings allow for easier and more precise localization of the positions, where phase changes happen. We show the localization capabilities by detecting phase singularities created by a trench. We also apply the concept to abrupt phase jumps of a phase diffractive component and determine the achievable resolution.

Paper Details

Date Published: 27 February 2019
PDF: 9 pages
Proc. SPIE 10914, Optical Components and Materials XVI, 109141W (27 February 2019); doi: 10.1117/12.2509668
Show Author Affiliations
Michail Symeonidis, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Dong Cheon Kim, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
HOLOEYE Photonics AG (Germany)
Andreas Hermerschmidt, HOLOEYE Photonics AG (Germany)
Myun-Sik Kim, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 10914:
Optical Components and Materials XVI
Shibin Jiang; Michel J. F. Digonnet, Editor(s)

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