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Proceedings Paper

Commercializing MEMS--too fast or too slow?
Author(s): S. Walsh; W. N. Carr; H. Mados; D. S. Narang
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Paper Abstract

MEMS as a technology base is coming of age, but as in any vital process growing pains occur. Commercializing MEMS is simultaneously viewed as agonizingly slow by many of its promoters and lightingly quick by many companies whose products are being replaced with MEMS based substitutes. This effort ties current efforts in market analysis, technology evaluations, competency based strategy in an effort to understand the pace of MEMS commercialization.

Paper Details

Date Published: 13 September 1996
PDF: 13 pages
Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250966
Show Author Affiliations
S. Walsh, New Jersey Institute of Technology and SEMI-Semiconductor Equipment and Materials International (United States)
W. N. Carr, New Jersey Institute of Technology (United States)
H. Mados, New Jersey Institute of Technology (United States)
D. S. Narang, Rensselaer Polytechnic Institute (United States)


Published in SPIE Proceedings Vol. 2880:
Microlithography and Metrology in Micromachining II
Michael T. Postek; Craig R. Friedrich, Editor(s)

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