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Proceedings Paper

Analysis of fixed-fixed beam test structures
Author(s): Janet C. Marshall; David T. Read; Michael Gaitan
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Paper Abstract

This paper presents recent NIST MicroElectroMechanical Systems fixed-fixed beam test structure data and analysis. These test structures show the most promise in measuring the compressive strain due to simplicity of the test structure design, simplicity of test and analysis, ability to better isolate compressive strain values as a function of geometry, and, most importantly, capability to record process variability data.

Paper Details

Date Published: 13 September 1996
PDF: 10 pages
Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250961
Show Author Affiliations
Janet C. Marshall, National Institute of Standards and Technology (United States)
David T. Read, National Institute of Standards and Technology (United States)
Michael Gaitan, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 2880:
Microlithography and Metrology in Micromachining II
Michael T. Postek; Craig R. Friedrich, Editor(s)

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