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An integrated linear time-grating displacement sensor with single alternating light field
Author(s): Changli Li; Min Fu; Ge Zhu; Zhiwei Pu; Xiaoyu Yu; Shuangya Zhang
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Paper Abstract

It is difficult to control consistency of light source and large volume in current linear time-grating displacement sensor with four-channel alternating light field. A novel integrated linear time-grating displacement measurement system with single alternating light field is proposed. Single alternating light field and micro-controlling phase-shift method are used to synthesize a signal of traveling wave. And the measurement of linear displacement is achieved by measuring a difference of zero-crossing time between a signal of traveling wave and a reference signal. Design of structural miniaturization, design of integrated circuit, design of transmitting surface of cosine and design of optimization of existing time-grating displacement sensor are analyzed in detail. According to measuring principle, manufacture of light source and photoelectric receiver are completed, and corresponding experimental platform is built. Experimental results indicate that the measuring errors of optimized sensor are reached within±0.2μm using grating pitch of 0.1mm in the measuring range of 100mm.

Paper Details

Date Published: 7 March 2019
PDF: 9 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110531A (7 March 2019); doi: 10.1117/12.2509598
Show Author Affiliations
Changli Li, Chongqing Univ. of Technology (China)
Min Fu, Chongqing Univ. of Technology (China)
Ge Zhu, Chongqing Univ. of Technology (China)
Zhiwei Pu, Chongqing Univ. of Technology (China)
Xiaoyu Yu, Chongqing Univ. of Technology (China)
Shuangya Zhang, Chongqing Univ. of Technology (China)

Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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