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Proceedings Paper

Davies bar as the reference for impact acceleration metrology
Author(s): Akira Umeda; Kazunaga Ueda
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Paper Abstract

The mass production of silicon accelerometers has clarified that the current acceleration standard is not perfect. The acceleration standard is usually transferred by a reference accelerometer with the so-called back-to-back connection technique. Manufacturers, however do not explain what sort of calibration technique is applied to the reference accelerometer in the impact acceleration range. This paper proposes a novel impact technique for accelerometers calibration. The input acceleration to an accelerometer to be tested is generated by the reflection of an elastic pulse at one end surface of a bar. The bar is called Davies Bar, after Prof. Davies, who measured the dynamic displacement of the end surface of a metal bar by electrodes. The experiment was the comparison between the calibration of RION PV-44A accelerometer by ENDEVCO 2270 and that by NRLM method. The paper concludes that Davies' Bar should be used as the reference for the impact acceleration, ranging from roughly 200 [m/s2] to 1000,000 [m/s2] for mainly following reasons: (1) NRLM method is based on laser interferometer measurement with the reliable accuracy. (2) The frequency bandwidth of the impact acceleration generated using Davies bar is much wider than that of reference accelerometers. (3) Back to back connection does not always enable the comparison between the measurement of the connecting surface motion and the accelerometers' outputs.

Paper Details

Date Published: 13 September 1996
PDF: 10 pages
Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250943
Show Author Affiliations
Akira Umeda, National Research Lab. of Metrology (Japan)
Kazunaga Ueda, National Research Lab. of Metrology (Japan)

Published in SPIE Proceedings Vol. 2880:
Microlithography and Metrology in Micromachining II
Michael T. Postek; Craig R. Friedrich, Editor(s)

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