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Proceedings Paper

Review on the importance of measurement technique in micromachine technology
Author(s): Akira Umeda
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Paper Abstract

In the beginning stage of MITI micromachine project, the committee on the standardization established in Micromachine Center recognized the importance of measurement technique for the promotion and the systemization of the micromachine technology. Micromachine Center is the organizing body for private sectors working in the MITI micromachine project which started in 1991. MITI stands for Ministry of International Trade and Industry in Japan. In order to known the requirements on the measurement technologies, the questionnaire was organized by the measurement working group in the committee. This talk covers the questionnaire and its results, and some research results obtained at National Research Laboratory of Metrology working as a member in the project.

Paper Details

Date Published: 13 September 1996
PDF: 13 pages
Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250942
Show Author Affiliations
Akira Umeda, National Research Lab. of Metrology (Japan)


Published in SPIE Proceedings Vol. 2880:
Microlithography and Metrology in Micromachining II
Michael T. Postek; Craig R. Friedrich, Editor(s)

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