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Proceedings Paper

Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films
Author(s): Valerie A. Ligachov; Anatolyi I. Popov; Sergei N. Stuokach
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Paper Abstract

The following paper presents the results of morphology (columnar structure) and properties investigations of 0.2 - 0.4 mkm thick amorphous hydrogenated carbon (C:H) films, prepared by radio frequency (rf) sputtering of graphite target in argon-hydrogen mixture.

Paper Details

Date Published: 13 September 1996
PDF: 5 pages
Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); doi: 10.1117/12.250939
Show Author Affiliations
Valerie A. Ligachov, Moscow Power Engineering Institute (Russia)
Anatolyi I. Popov, Moscow Power Engineering Institute (Russia)
Sergei N. Stuokach, Moscow Power Engineering Institute (Russia)


Published in SPIE Proceedings Vol. 2877:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III
Damon K. DeBusk; Ray T. Chen, Editor(s)

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