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Proceedings Paper

Implementing surface photo-voltage in manufacturing
Author(s): Martine Simard-Normandin
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Paper Abstract

The acquisition of surface photo-voltage (SPV) instrument is only one step in the implementation of a metallic contamination reduction program. In order to take manufacturing decisions based on surface photo-voltage data, one must understand the strengths and limitations of the technique and avoid its pitfalls. We review the steps taken to implement SPV in our fab.

Paper Details

Date Published: 13 September 1996
PDF: 12 pages
Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); doi: 10.1117/12.250932
Show Author Affiliations
Martine Simard-Normandin, Nortel North America (Canada)


Published in SPIE Proceedings Vol. 2877:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III
Damon K. DeBusk; Ray T. Chen, Editor(s)

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