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Proceedings Paper

Novel double-focus interferometer for scanning force microscope
Author(s): Yongmo Zhuo; Xu-Dong Mou; Yongying Yang; Bin Cao
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Paper Abstract

A novel double focus optical interferometer for scanning force microscope is presented in this paper. The deflection of the force sensing cantilever is measured by detecting the phase shift of two orthogonal polarized light beams reflected from the end of the cantilever and a reference plane with a hole in the center. We have tested some samples by using this instrument and gotten some high resolution pictures. The instrument provides 0.1 nm height resolution and 5 nm lateral resolution and is especially applicable in the profilometer of the integral circuit, fine grate, etc.

Paper Details

Date Published: 13 September 1996
PDF: 5 pages
Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); doi: 10.1117/12.250926
Show Author Affiliations
Yongmo Zhuo, Zhejiang Univ. (China)
Xu-Dong Mou, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Bin Cao, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 2877:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III
Damon K. DeBusk; Ray T. Chen, Editor(s)

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