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Proceedings Paper

Practical automatic feedback system for polyphoto CD control
Author(s): Jeng-Hong Chen; C. Y. Wang
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Paper Abstract

A practical automatic feedback system of exposure energy is proposed to improve the polygate photo critical dimension (CD) control. By the curve of (Delta) (CD) versus (Delta) (exposure energy), we can give the right exposure energy to the current lot by the preceding 5 (or 3) lots' CD, measured by CD SEM. To be easily used, the curve is approached as a linear function. Two months experiment of exposure energy feedback system is carried out on actual 0.5 micrometer i- line SRAM process. The capability index (Cpk) of polygate photo CD has been dramatically improved.

Paper Details

Date Published: 13 September 1996
PDF: 7 pages
Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); doi: 10.1117/12.250907
Show Author Affiliations
Jeng-Hong Chen, Taiwan Semiconductor Manufacturing Co. (Taiwan)
C. Y. Wang, Taiwan Semiconductor Manufacturing Co. (Taiwan)


Published in SPIE Proceedings Vol. 2876:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
Armando Iturralde; Te-Hua Lin, Editor(s)

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