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Proceedings Paper

Control chart design strategies for skewed data
Author(s): Steven T. Mandraccia; Galen D. Halverson; Youn-Min Chou
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Paper Abstract

Individual measurements and moving-range control charts are applied when the quality characteristic follows a normal distribution. In the semiconductor industry, certain quality characteristics are monitored where the data do not follow a normal distribution. In this paper we consider alternative design strategies for control charts where the distribution of the data is skewed. Although we use skewed data, these techniques are also applicable to other non-normally distributed data. We discuss using a 'state of the art' curve-fitting method, data transformations, and nonsymmetrical limits for the control charting of skewed data. This paper provides alternatives for the design, implementation, and maintenance of process control for non- normal or skewed data.

Paper Details

Date Published: 13 September 1996
PDF: 10 pages
Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); doi: 10.1117/12.250904
Show Author Affiliations
Steven T. Mandraccia, Sony Semiconductor Co. of America (United States)
Galen D. Halverson, Sony Semiconductor Co. of America (United States)
Youn-Min Chou, Univ. of Texas/San Antonio (United States)


Published in SPIE Proceedings Vol. 2876:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
Armando Iturralde; Te-Hua Lin, Editor(s)

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