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Proceedings Paper

Nondestructive testing of semiconductors and thin coatings
Author(s): Yuri N. Pchelnikov; Andrey A. Yelizarov
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Paper Abstract

The paper presents new measuring technology based on slow- wave structures (SWS) application. It shows peculiarities and advantages of sensors on SWS. The method is based on the interaction between the electromagnetic wave exited in SWS and the object to be checked up. It deals as well with a transducer for non-contact measurements of surface conductivity and thickness of thin films and conductive layers on dielectric or semiconductor substrates. It shows perspectives of designing other transducers on SWS for measuring different physical parameters.

Paper Details

Date Published: 13 September 1996
PDF: 8 pages
Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); doi: 10.1117/12.250901
Show Author Affiliations
Yuri N. Pchelnikov, Moscow State Institute of Electronics and Mathematics (Russia)
Andrey A. Yelizarov, Moscow State Institute of Electronics and Mathematics (Russia)


Published in SPIE Proceedings Vol. 2876:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
Armando Iturralde; Te-Hua Lin, Editor(s)

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