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Proceedings Paper

Systems engineering approach to maintainability optimization with case studies on ion implanters and sputtering tools
Author(s): Emiliano Girolami; Maurizio Mazzer
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Paper Abstract

Systems engineering methods can be applied to almost any engineering task, this paper outlines the approach adopted to optimize maintenance activities in a wafer fab environment with applications on ion implanters and sputtering tools. The trade-off was to design an effective maintenance system keeping in mind the production requirements. The analysis phase identified areas of improvements in preventive maintenance (PM) scheduling, corrective maintenance (CM) control and reporting, logistic support management and equipment maintainability. All those tasks have been included in the work breakdown structure (WBS) and implemented. The results were a strong increase in equipment availability in the implanter's case and a reduction on failure rate for sputters. Future developments will consider the introduction of expert systems to help personnel in diagnoses and machine status control.

Paper Details

Date Published: 13 September 1996
PDF: 10 pages
Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); doi: 10.1117/12.250895
Show Author Affiliations
Emiliano Girolami, Texas Instruments Inc (United States)
Maurizio Mazzer, Texas Instruments Italia SpA (Italy)

Published in SPIE Proceedings Vol. 2876:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
Armando Iturralde; Te-Hua Lin, Editor(s)

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