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Modifications of surface topography by acoustic resonance induced by laser ablation with ultrashort laser pulses
Author(s): Gerhard Kunz; Alexander Kroschel; Tobias Menold; Andreas Michalowski; Mawuli Ametowobla
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Paper Abstract

Scanning ultra-short pulse laser ablation is a very flexible technology that can be used for the subtractive manufacturing of complex three-dimensional structures with precision requirements on micrometer level. In our studies, inadvertent periodic deviations at the bottom of ablated cavities in silicon were observed after laser ablation with ultra-short laser pulses. We introduce the hypothesis of an interdependency between the ablation process and ultrasonic resonant acoustic waves, also known as standing waves, forming in the air within the ablated volume. Using basic acoustic wave equations, the corresponding periodicity of the deviations at the bottom surface of the cavities is described with good agreement to our experimental data.

Paper Details

Date Published: 4 March 2019
PDF: 7 pages
Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 109050E (4 March 2019); doi: 10.1117/12.2508539
Show Author Affiliations
Gerhard Kunz, Robert Bosch GmbH (Germany)
Alexander Kroschel, Robert Bosch GmbH (Germany)
Tobias Menold, Robert Bosch GmbH (Germany)
Andreas Michalowski, Robert Bosch GmbH (Germany)
Mawuli Ametowobla, Robert Bosch GmbH (Germany)

Published in SPIE Proceedings Vol. 10905:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Tetsuya Makimura; Gediminas Račiukaitis; Carlos Molpeceres, Editor(s)

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