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Proceedings Paper • new

Cubic-inch MOEMS spectral imager
Author(s): Antti Näsilä; Christer Holmlund; Endija Briede; Rami Mannila; Roberts Trops; Martti Blomberg; Ingmar Stuns; Bin Guo; Kai Viherkanto; Kari Rainio; Heikki Saari; Anna Rissanen
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Paper Abstract

Recently developed tunable MEMS Fabry- Perot interferometers based on Ag thin-film mirrors[1] have enabled building highly miniaturized spectral imagers covering almost the complete VNIR wavelength range. The level of miniaturization required by modern smartphone industry has created extremely compact, high performance electronics and camera technologies and by utilizing these technologies together with the novel MEMS FPI’s, it is possible to create extremely compact spectral imagers while still achieving good performance. This paper presents a spectral imager design that can be fit inside an envelope of 1 cubic inch (25.4 × 25.4 × 25.4 mm3 ) and it will be capable of recording images at freely selectable wavelengths within the range of ca. 650 nm - 950 nm. The imager field of view is ca. 12.5° × 10° and the image size is 640 × 512 pixels. Nominally the imager will be focused from ca. 0.5 m to infinity, but with additional optics it is possible to use the imager as a microscope. The compact size of the imager allows the easy integration to almost any available platform, including small drones, nanosatellites or planetary rovers, where small size is essential. It is also possible to integrate the imager to handheld devices, so the potential field of applications will be extensive.

Paper Details

Date Published: 4 March 2019
PDF: 7 pages
Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310F (4 March 2019); doi: 10.1117/12.2508420
Show Author Affiliations
Antti Näsilä, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Christer Holmlund, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Endija Briede, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Rami Mannila, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Roberts Trops, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Martti Blomberg, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Ingmar Stuns, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Bin Guo, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Kai Viherkanto, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Kari Rainio, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Heikki Saari, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Anna Rissanen, VTT Technical Research Ctr. of Finland Ltd. (Finland)


Published in SPIE Proceedings Vol. 10931:
MOEMS and Miniaturized Systems XVIII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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