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Influence of main operating laser parameters for high-rate material removal from low density Ta2O5 samples
Author(s): R. Bourdenet; I. Geoffray; M. Merle; C. Chicanne; M. Theobald
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Paper Abstract

CEA designs, studies and manufactures targets dedicated to laser experiments on the MegaJoule laser facility. These centimetric experimental objects are the place of laser/matter interactions: their designs are continuously evolving and combine many different materials and with various geometries. Their manufacturing requires high versatile and accurate level means. Among these technologies, laser micromachining means have been developed – namely based on excimer or femtosecond lasers. They combine the unique capacity to process many different materials with an outstanding precision and a small affected zone. In this study, we report experimental data related to tantalum oxide aerogel (Ta2O5) samples – low density material of interest for laser/matter experiments. This work aimed to get a first set of operating parameters for deep static drilling. In that goal we used different kind of laser sources: 193 nm excimer laser, Ti:Sa or Ytterbiumbased femtosecond lasers. Various parameters have been explored like fluence, wavelength, pulse duration and are related to ablation rates.

Paper Details

Date Published: 4 March 2019
PDF: 12 pages
Proc. SPIE 10906, Laser-based Micro- and Nanoprocessing XIII, 109061P (4 March 2019); doi: 10.1117/12.2508407
Show Author Affiliations
R. Bourdenet, CEA-Valduc (France)
I. Geoffray, CEA-Valduc (France)
M. Merle, CEA-Valduc (France)
C. Chicanne, CEA-Valduc (France)
M. Theobald, CEA-Valduc (France)

Published in SPIE Proceedings Vol. 10906:
Laser-based Micro- and Nanoprocessing XIII
Udo Klotzbach; Akira Watanabe; Rainer Kling, Editor(s)

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