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Proceedings Paper

Advanced software system for yield improvement on manufacturing fab
Author(s): Miguel Recio; Almudena Fernandez; Victorino Martin Santamaria; Maria J. Peman; Gerardo Gonzalez; J. R. Hoyer; Steve Whitlock; David James; Mark Hausen
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Paper Abstract

How can we optimize the data collection and data processing to provide us with the most significant information to drive the yield enhancement in a fast and efficient way? With the aim of facing this question this paper describes a software- system which is a part of the global yield enhancement strategy at our factory. The software developed correlates data gathered both in-line and at the end of the fabrication process. The description of the system is accompanied with descriptions of historical cases trying to show the capabilities of the type of correlation. The paper also discusses the natural expansion of the software-system to convert it into a more 'knowledge-based' tool.

Paper Details

Date Published: 12 September 1996
PDF: 11 pages
Proc. SPIE 2874, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II, (12 September 1996); doi: 10.1117/12.250830
Show Author Affiliations
Miguel Recio, Lucent Technologies Madrid (Spain)
Almudena Fernandez, Lucent Technologies Madrid (Spain)
Victorino Martin Santamaria, Lucent Technologies Madrid (Spain)
Maria J. Peman, Lucent Technologies Madrid (Spain)
Gerardo Gonzalez, Lucent Technologies Madrid (Spain)
J. R. Hoyer, Lucent Technologies Orlando (Spain)
Steve Whitlock, Lucent Technologies Orlando (United States)
David James, Lucent Technologies Bell Labs. (United States)
Mark Hausen, Lucent Technologies Bell Labs. (United States)

Published in SPIE Proceedings Vol. 2874:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II
Ali Keshavarzi; Sharad Prasad; Hans-Dieter Hartmann, Editor(s)

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