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MEMS FTIR optical spectrometer enables detection of volatile organic compounds (VOCs) in part-per-billion (ppb) range for air quality monitoring
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Paper Abstract

Air pollution is used to refer to the release of pollutants into the air, where these pollutants are harmful to the human health and our planet. The main source of these pollutants comes from energy production and consumption that release Volatile Organic Compounds (VOCs) such as BTEX and Aldehydes group. Real time monitoring of these VOCs in factories, stations, homes and in the street is important for analysis of the pollution sources fingerprint and for alerting, when exceeding the harmful limits. In this work we report the use of a MEMS FTIR spectrometer in the mid-infrared for this purpose. The spectrometer works in the wavelength range of 1.6 μm - 4.9 μm with a resolution down to 33 cm-1. This covers the absorption spectrum of water vapour, BTEX, Aldehydes and CO2 around 2.65 μm, 3.27 μm, 3.6 μm and 4.3 μm, respectively. The spectra of Toluene with different concentrations are measured, using a multipass gas cell with a physical length of 50 cm and an optical path length of 20 m, showing excellent sensor linearity. The minimum concentration measured is 350 ppb limited by the interference of the side lobes of the strong absorption of water vapour, which can be overcome in the future by humidity compensation. The SNR is measured and found to be 5000:1, corresponding to a detection limit of about 90 ppb. The achieved results open the door for a compact and low-cost solution targeting air pollution monitoring.

Paper Details

Date Published: 4 March 2019
PDF: 7 pages
Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093109 (4 March 2019); doi: 10.1117/12.2508239
Show Author Affiliations
Alaa Fathy, Univ. Paris-Est (France)
Si-Ware Systems (Egypt)
Yasser M. Sabry, Si-Ware Systems (Egypt)
Ain Shams Univ. (Egypt)
Mariam Amr, Si-Ware Systems (Egypt)
Ain Shams Univ. (Egypt)
Martine Gnambodoe-Capo-chichi, Univ. Paris-Est (France)
Momen Anwar, Si-Ware Systems (Egypt)
Amr O. Ghoname, Ain Shams Univ. (Egypt)
Ahmed Amr, Ain Shams Univ. (Egypt)
Ahmed Saeed, Si-Ware Systems (Egypt)
Mina Gad, Si-Ware Systems (Egypt)
Mohamed Al Haron, Si-Ware Systems (Egypt)
Mazen Erfan, Univ. Paris-Est (France)
Yamin Leprince-Wang, Univ. Paris-Est (France)
Bassam Saadany, Si-Ware Systems (Egypt)
Diaa Khalil, Si-Ware Systems (Egypt)
Ain Shams Univ. (Egypt)
Tarik Bourouina, Univ. Paris-Est (France)
Si-Ware Systems (Egypt)


Published in SPIE Proceedings Vol. 10931:
MOEMS and Miniaturized Systems XVIII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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