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Proceedings Paper

Nondestructive evaluation of material structure by second harmonic generation
Author(s): Daniele Blanc; Alain Cachard; Jean Claude Pommier
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Paper Abstract

Second harmonic generation can be used to probe the microstructure of materials. This non-destructive all- optical method is applied to quantify the orientation of the micro-columns constituting aluminium nitride thin films. Very small tilt angles of the columns are easily detectable. This technique is applicable to the control of material structure during deposition.

Paper Details

Date Published: 18 September 1996
PDF: 11 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250809
Show Author Affiliations
Daniele Blanc, Univ. Jean Monnet (France)
Alain Cachard, Univ. Jean Monnet (France)
Jean Claude Pommier, Univ. Jean Monnet (France)


Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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