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Proceedings Paper

Interferometric method for characterizing the mechanical properties of thin films by bulging tests
Author(s): Eric Bonnotte; L. Robert; Patrick Delobelle; Luc Bornier; Bertrand Trolard; Gilbert M. Tribillon; D. Mairey
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Paper Abstract

A fringe projection method (contouring) is applied for the mechanical characterization of thin films by bulging tests. This method is then coupled with the technique of phase modulation (phase shifting interferometry) thus allowing the phase image of the membrane, hence the displacements at all points, to be determined. We discuss the precision and the sensitivity of the method. This technique is then applied to membrane bulging tests performed on single silicon crystals, on thin Si-SiO2 films and on electro-deposited nickel. For these materials, the Young's moduli and the internal stresses resulting from the fabrication process are determined and compared with the values obtained by other methods. The examples presented allow the principle of the bulging test and the apparatus to be validated.

Paper Details

Date Published: 18 September 1996
PDF: 11 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250800
Show Author Affiliations
Eric Bonnotte, Lab. de Mecanique Appliquee (France)
L. Robert, Lab. de Mecanique Appliquee (France)
Patrick Delobelle, Lab. de Mecanique Appliquee (France)
Luc Bornier, Lab. de Mecanique Appliquee (France)
Bertrand Trolard, Lab. d'Optique de Besancon (France)
Gilbert M. Tribillon, Lab. d'Optique de Besancon (France)
D. Mairey, Lab. de Radio-Cristallographie (France)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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