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Proceedings Paper

Multispectral measurements of slightly anisotropic thin films by guided optics method
Author(s): Josep Massaneda; Francois Flory; Salvador Bosch; Jordi Martorell; Serge Monneret
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Paper Abstract

We report quantitative evidence of the slight anisotropic behavior of several Ta2O5 dielectric thin films. Refractive indices and thickness have been determined by using the prism-film coupler setup. In order to obtain dispersion values for the refractive indices, the measurements have been realized at four different wavelengths, 632.8, 514.5, 488.0 and 457.9 nm. We have checked the results by measuring the layers with two different prisms. A new numerical approach to the problem has been useful to determine the parameters of the layers.

Paper Details

Date Published: 18 September 1996
PDF: 11 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250799
Show Author Affiliations
Josep Massaneda, Univ. de Barcelona (Spain)
Francois Flory, Ecole Nationale Superieure de Physique de Marseille (France)
Salvador Bosch, Univ. de Barcelona (Spain)
Jordi Martorell, Univ. Politecnica de Catalunya (Spain)
Serge Monneret, Ecole Nationale Superieure de Physique de Marseille (France)


Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements

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