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Proceedings Paper

Phase modulation methods of interferometry
Author(s): Ilya Sh. Etsin; Lev N. Butenko
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Paper Abstract

Interferometric methods of sinusoidal, single-frequency phase modulation and two-frequency phase modulation have been investigated and compared as applied to displacement measurements and wavefront testing. A procedure of an experimental estimation of the periodic error which is a basic component of a systematic error of interferometric systems is developed. It is shown that the conventional single-frequency phase modulation method is preferable when it is desirable to have extreme resolution or maximum accuracy, while the method of two-frequency phase modulation will be more rational when small dimensions and weight of the device are of basic concern.

Paper Details

Date Published: 18 September 1996
PDF: 12 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250796
Show Author Affiliations
Ilya Sh. Etsin, S.I. Vavilov State Optical Institute (Russia)
Lev N. Butenko, S.I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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