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Proceedings Paper

Differential optical profilometer using a single-probe beam
Author(s): N. B. E. Sawyer; Chung Wah See; Michael G. Somekh
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Paper Abstract

This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

Paper Details

Date Published: 18 September 1996
PDF: 10 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250795
Show Author Affiliations
N. B. E. Sawyer, Univ. of Nottingham (United Kingdom)
Chung Wah See, Univ. of Nottingham (United Kingdom)
Michael G. Somekh, Univ. of Nottingham (United Kingdom)


Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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