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Proceedings Paper

Common path interferometric microellipsometry
Author(s): Yueai Liu; Chung Wah See; Michael G. Somekh
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Paper Abstract

Common path interferometric microellipsometry based on the Young's interference principle is presented. Interference of the pure p and s reflections at the back focal plane of a microscopic objective takes place by means of Young's interferometry. Therefore, the amplitude ratio, tan (psi) , and the phase different, (Delta) , of the two polarization components are represented as the contrast and the phase shift of the Young's fringe pattern. Hence, the complex refractive index of the sample can be calculated using well- known equations. This technique is particularly applicable in pure topography where the measured optical phase is actually a contribution of both the surface height change and material change as well.

Paper Details

Date Published: 18 September 1996
PDF: 11 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250794
Show Author Affiliations
Yueai Liu, Univ. of Nottingham (United Kingdom)
Chung Wah See, Univ. of Nottingham (United Kingdom)
Michael G. Somekh, Univ. of Nottingham (United Kingdom)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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