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Proceedings Paper

Optical testing of fine grating structures
Author(s): Peter Blattner; Hans Peter Herzig
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Paper Abstract

The ability to measure the relief parameters and the absolute position accuracy of micrometer-sized structures is of obvious importance, not only to determine if the desired structure has been realized, but also to optimize the fabrication process. In this paper a simple characterization method is presented allowing fast and non-destructive testing of phase and amplitude gratings over large areas. Local line width and position errors can be detected. The theoretical modeling is based on rigorous diffraction theory.

Paper Details

Date Published: 18 September 1996
PDF: 7 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250793
Show Author Affiliations
Peter Blattner, Univ. of Neuchatel (Switzerland)
Hans Peter Herzig, Univ. of Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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