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Proceedings Paper

Lithography on PMMA-DR1 with reflection near-filed optical microscopy (R-SNOM) and probe characterization
Author(s): Stephane Davy; G. Rachard; Michel Spajer
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Paper Abstract

We propose a method of scanning near field optical lithography where the result of the process is controlled in quasi real time. Irradiation of the polymer involves a topographic modification of the layer. It is detected mechanically by the fiber tip, which plays the role of a nanosource and of shear force probe. A single snapshot gives an image of the intensity distribution around the tip. A resolution better than 100 nm is obtained even with dielectric tips.

Paper Details

Date Published: 18 September 1996
PDF: 8 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250784
Show Author Affiliations
Stephane Davy, Univ. de Franche-Comte (France)
G. Rachard, Univ. de Franche-Comte (France)
Michel Spajer, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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