Share Email Print
cover

Proceedings Paper • new

Study of plasma formation in solid dielectrics with the help of low-order harmonic emission
Author(s): Alexandre Mermillod-Blondin; Peter Jürgens; Benjamin Liewehr; Björn Kruse; Christian Peltz; Tobias Witting; Anton Husakou; Mikhail Ivanov; Thomas Fennel; Marc J. J. Vrakking
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The applications of ultrashort laser pulses (< 1 ps duration) for micromachining have continuously expanded during the past decade. In particular, femtosecond (fs) laser sources represent unique tools for microprocessing solid dielectrics such as glasses, crystals, or bio-compatible materials. The chain of physical events leading to laser-induced material modification starts with the formation of an electron-hole plasma which essentially proceeds through two distinct channels: strong-field ionization (SFI) and electron-electron impact ionization (EEII). In solids, these mechanisms take place intrapulse, i.e. when the electric field from the laser pulse is still present in the interaction region. Because of the short timescales involved and because of their concomitant character, determining the relative importance of the ionization channels at play is very challenging. In this article, we describe a strategy to determine the relative importance of SFI versus collisional ionization in the plasma formation when irradiating solid dielectrics with ultrashort pulses.

Paper Details

Date Published: 4 March 2019
PDF: 6 pages
Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 109050O (4 March 2019); doi: 10.1117/12.2507836
Show Author Affiliations
Alexandre Mermillod-Blondin, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
Peter Jürgens, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
Benjamin Liewehr, Univ. Rostock (Germany)
Björn Kruse, Univ. Rostock (Germany)
Christian Peltz, Univ. Rostock (Germany)
Tobias Witting, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
Anton Husakou, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
Mikhail Ivanov, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
Thomas Fennel, Univ. Rostock (Germany)
Marc J. J. Vrakking, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)


Published in SPIE Proceedings Vol. 10905:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Tetsuya Makimura; Gediminas Račiukaitis; Carlos Molpeceres, Editor(s)

© SPIE. Terms of Use
Back to Top