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Proceedings Paper

Determination of the resolution in scanning near-field optical images with the help of shear force feedback
Author(s): Dominique Barchiesi; Christian Pieralli
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Paper Abstract

One of the challenges for newly born probe microscopies is the estimation of their capabilities. The latter is closely related to the reachable resolution. We present a method adapted to these microscopies for determining resolution. It is applied to Reflection Scanning Near-field Optical Microscopy combined with shear-force (ShF) feedback but the method is quite general. The resolution is deduced from the comparison of the optical data spectrum to the shear force data one. Indeed, it is well known that spatial resolution of shear force is better than that of optical microscope and the optical resolution can thus be estimated through this comparison. Actually, the considered set-up uses ShF feedback. Quantitative results are given either with periodic or non periodic objects.

Paper Details

Date Published: 18 September 1996
PDF: 9 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250782
Show Author Affiliations
Dominique Barchiesi, Univ. de Franche-Comte (France)
Christian Pieralli, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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