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Proceedings Paper

Equivalent wavelength interferometry using diffractive optics
Author(s): Peter J. de Groot
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Paper Abstract

When two beams of an interferometer are directed to the same object at different incident angles, the recombined, reflected beams generate an interference pattern with a large equivalent wavelength. This paper reviews the basic principles of these `desensitized' interferometers, and describes a novel diffractive geometry that is particularly well adapted to manufacturing applications, thanks to its large working distance, achromatism and high accuracy.

Paper Details

Date Published: 18 September 1996
PDF: 9 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250773
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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