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Proceedings Paper • new

Inkjet printing of microlens arrays on large, lithographic structured substrates
Author(s): Erik Beckert; Falk Kemper; Peter Schreiber; Maximilian Reif; Peter Dannberg
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Paper Abstract

Micro-lens array manufacturing by using an inkjet printing technology allows for the manufacturing of large area arrays on lithographically structured substrates that contain oleophobic and oleophilic surface patterns. An inkjet printing process deposits the high performance, hybrid polymer ORMOCER on the oleophilic pattern. The material forms by means of surface tension and wetting boundaries a lens shape, while the inkjet printing process itself enables for a highly parallel manufacturing of many lenses at the same time. A typical geometrical deviation <2% of the radius of curvature for lenses with diameters of <1 mm, ROC’s of ca. <2 mm and sag heights of <100 microns was achieved. Also a specific lithography processing regime was derived that combines wetting patterns with optical apertures to enable advanced illumination setups like multi-aperture projection.

Paper Details

Date Published: 4 March 2019
PDF: 7 pages
Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 109300C (4 March 2019); doi: 10.1117/12.2507605
Show Author Affiliations
Erik Beckert, Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF (Germany)
Falk Kemper, Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF (Germany)
Peter Schreiber, Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF (Germany)
Maximilian Reif, Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF (Germany)
Peter Dannberg, Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF (Germany)


Published in SPIE Proceedings Vol. 10930:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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