Share Email Print
cover

Proceedings Paper

High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator
Author(s): Benito Vasquez Dorrio; J. Bugarin; Jose M. Alen; Antonio Fernandez; Angel F. Doval; Jose Carlos Lopez Vazquez; Jesus Blanco-Garcia; J. L. Fernandez; Mariano Perez-Amor
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The topographic measurement of high reflectivity test surfaces in a Fizeau interferometer using different two-beam phase-stepping algorithms (TBPSA's) is presented. Low pass- filtering the superposition of a multiple-beam Fizeau pattern and a Ronchi grid renders a pattern of sinusoidal profile (the moire image) that contains the Fizeau phase and that can be phase modulated by the in-plane translation of the grid. A set of these phase-shifted moire images can be combined in different TBPSA's in order to calculate the Fizeau phase making clear, at the same time, the sensitivity of the method to use the main phase error sources.

Paper Details

Date Published: 18 September 1996
PDF: 9 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250752
Show Author Affiliations
Benito Vasquez Dorrio, Univ. de Vigo (Spain)
J. Bugarin, Univ. de Vigo (Spain)
Jose M. Alen, Univ. de Vigo (Spain)
Antonio Fernandez, Univ. de Vigo (Spain)
Angel F. Doval, Univ. de Vigo (Spain)
Jose Carlos Lopez Vazquez, Univ. de Vigo (Spain)
Jesus Blanco-Garcia, Univ. de Vigo (Spain)
J. L. Fernandez, Univ. de Vigo (Spain)
Mariano Perez-Amor, Univ. de Vigo (Spain)


Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements

© SPIE. Terms of Use
Back to Top