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Proceedings Paper

Displacement field measurement in the nanometer range
Author(s): Yves Surrel; Nicolas Fournier
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Paper Abstract

The grid method is a classical tool for displacement measurement, which provides field data. This method has benefited very much from the phase-shifting technique in recent years. Two examples of applications of this method in the nanometer range are presented. The first one concerns the materials science: it is shown that microgrids observed by SEM can provide displacement field data with an accuracy of a few nanometers. The second one concerns the measurement of a rigid-body displacement. In this case, displacement data can be averaged over the whole field, drastically increasing the sensitivity. It is shown that a sensitivity of 7 nm can be achieved by using a coarse grid with 8 lines per mm. This sensitivity corresponds to 1/18000 of the grid pitch.

Paper Details

Date Published: 18 September 1996
PDF: 10 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250749
Show Author Affiliations
Yves Surrel, Ecole des Mines de Saint-Etienne (France)
Nicolas Fournier, Ecole des Mines de Saint-Etienne (France)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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