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Proceedings Paper

Micromeasurements: a challenge for photomechanics
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Paper Abstract

Modern Micro Electro Mechanical Systems (MEMS) place ever increasing dependence on miniaturization of components and rely on computational and experimental methods to reach their objectives. This miniaturization requires a detailed knowledge of micromechanical behavior of materials used in development of the components and emphasizes design validation of finished products. This information is provided by electronic holography and grating interferometry used as full field, noninvasive experimental techniques. The usefulness of these methods is shown on several examples including determination of local material properties, stress, relaxation of microelements and dynamic characteristic study of MEMS.

Paper Details

Date Published: 18 September 1996
PDF: 10 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250743
Show Author Affiliations
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Ryszard J. Pryputniewicz, Worcester Polytechnic Institute (United States)


Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements

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