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Proceedings Paper

Application of micromachining technology to optical devices and systems
Author(s): Hiroyuki Fujita
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Paper Abstract

Micromachine technologies based on IC-compatible micromachining have advantages denoted by three `M's'. Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicated elements, and Microelectronics to control motions or to add different functions such as the optical function are equally important. This paper deals with the application of micromachine technologies to micro optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems are reviewed.

Paper Details

Date Published: 17 September 1996
PDF: 10 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250721
Show Author Affiliations
Hiroyuki Fujita, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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