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Proceedings Paper

Thermopneumatical micropump and microvalves for a medical analyzing system
Author(s): Zouhair Sbiaa; Henri Camon; Daniel Esteve
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Paper Abstract

The chemical analysis plays an important role in a clinical medicine. A small size of the analyzing system and reduced sample volume are required. Fully recognizing the benefits of this technology, we are working in the frame of a European project called BARMINT (basic research for microsystem integration) and is concerned with the development of a novel microsystem containing chemical and pressure sensors for the chemical analysis of fluids.

Paper Details

Date Published: 17 September 1996
PDF: 6 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250720
Show Author Affiliations
Zouhair Sbiaa, Lab. et d'Analyse et d'Architecture des Systemes/CNRS (France)
Henri Camon, Lab. et d'Analyse et d'Architecture des Systemes/CNRS (France)
Daniel Esteve, Lab. et d'Analyse et d'Architecture des Systemes/CNRS (France)


Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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