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Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS
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Paper Abstract

By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.

Paper Details

Date Published: 4 March 2019
PDF: 7 pages
Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 1090519 (4 March 2019); doi: 10.1117/12.2507088
Show Author Affiliations
Shuichiro Hayashi, Keio Univ. (Japan)
Yasutaka Nakajima, Keio Univ. (Japan)
Mitsuhiro Terakawa, Keio Univ. (Japan)

Published in SPIE Proceedings Vol. 10905:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Tetsuya Makimura; Gediminas Račiukaitis; Carlos Molpeceres, Editor(s)

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