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Proceedings Paper

Development and manufacturing of a two-dimensional microactuator for moving an optical fiber
Author(s): Thomas Frank
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Paper Abstract

This paper describes the design, fabrication and testing of an electrodynamical microactuator for moving an optical fiber. This device with two degrees of freedom has a motion range of 200 micrometers . It is used for the alignment of optical fibers in the sub-micrometer range. The positioning of a monomode optical fiber with respect to one or several other optical fibers or an optical chip is possible. As a result of the electrodynamic principle the motion is free of slide and friction. The technologies of wet chemical etching of silicon and galvanic batch-processes are used. The magnetic field is generated by a permanent magnet. Around the magnet surface copper coils are built for the deflection of the magnet in two dimensions.

Paper Details

Date Published: 17 September 1996
PDF: 9 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250708
Show Author Affiliations
Thomas Frank, Technische Univ. Ilmenau (Germany)


Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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