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Proceedings Paper

Development and fabrication of a rotary micropump and its industrial and medical applications
Author(s): Thomas Weisener; Gerald Voegele; Mark Widmann; Carlo Bark; Rolf Dieter Schraft; Axel Bertholds; Andreas Braunschweiler
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Paper Abstract

The development of small pumps in the area of microsystem technology has lead to many different prototypes, mainly using membranes. In contrast to this, a rotary working pump has been developed at Fraunhofer-Institut fuer Produktionstechnik und Automatisierung (IPA) with which both an improvement in output, as well as pressures previously not possible have been reached. After a first prototype pump with an outer diameter of 10 mm an optimized prototype with an outer diameter of only 2.5 mm was fabricated in cooperation with AGIE applying electro-dischange-machining. Presently Fraunhofer IPA is working upon the design of a micromotor with the same functional principles. The applications of the new microhydraulic system are exceedingly numerous and extend from technical to medical products.

Paper Details

Date Published: 17 September 1996
PDF: 8 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250707
Show Author Affiliations
Thomas Weisener, Fraunhofer-Institut fuer Produktionstechnik und Automatisierung (Germany)
Gerald Voegele, Fraunhofer-Institut fuer Produktionstechnik und Automatisierung (Germany)
Mark Widmann, Fraunhofer-Institut fuer Produktionstechnik und Automatisierung (Germany)
Carlo Bark, Fraunhofer-Institut fuer Produktionstechnik und Automatisierung (Germany)
Rolf Dieter Schraft, Fraunhofer-Institut fuer Produktionstechnik und Automatisierung (Germany)
Axel Bertholds, AGIE SA (Switzerland)
Andreas Braunschweiler, AGIE SA (Switzerland)


Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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