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Proceedings Paper

Mercury-contact switching with gap-closing microcantilever
Author(s): Scott Saffer; Jonathan Simon; Chang-Jin Kim; Kyung Ho Park; Jong-Hyun Lee
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Paper Abstract

We present an electrostatically actuated micro-mechanical relay with a stationary mercury micro-drop at the point of contact. The moving element is 2 micrometers thick polysilicon cantilever with widths from 2 to 3 micrometers and lengths from 300 to 500 micrometers made through MCNC multi-user MEMS processes. A technique to selectively form microscale mercury on prescribed sites was used to accomplish mercury- to-electrode contacts for the relays. Measurements of the poly-mercury-poly contact resistance resulted in values that range from 800 to 1000 (Omega) , with most values near 1000 (Omega) . The total resistance of the devices varied from 1.9 k(Omega) to 3.2 k(Omega) depending on the device configuration. The device can switch loads over 10 mA.

Paper Details

Date Published: 17 September 1996
PDF: 6 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250705
Show Author Affiliations
Scott Saffer, Univ. of California/Los Angeles (United States)
Jonathan Simon, Univ. of California/Los Angeles (United States)
Chang-Jin Kim, Univ. of California/Los Angeles (United States)
Kyung Ho Park, Electronics and Telecommunications Research Institute (South Korea)
Jong-Hyun Lee, Electronics and Telecommunications Research Institute (South Korea)

Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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