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Proceedings Paper

Novel MEMS simulation tool for thermal-based radiation sensors
Author(s): Nicholas R. Swart; Hubert Jerominek; Philippe Lambert
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Paper Abstract

We report a simulation tool employing the finite element method for thermal-based radiation sensor analysis. Application of the tool to bolometric detectors is described, and simulation examples are given. Excellent agreement is observed between experimental and measured data. In addition, an equivalent circuit model, with pertinent parameters calculated automatically by the simulation tool, is also presented.

Paper Details

Date Published: 17 September 1996
PDF: 10 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250704
Show Author Affiliations
Nicholas R. Swart, National Optics Institute (Canada)
Hubert Jerominek, National Optics Institute (Canada)
Philippe Lambert, National Optics Institute (Canada)


Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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