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Proceedings Paper

Microsystem CAD
Author(s): Jan G. Korvink; Henry Baltes
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Paper Abstract

Microsystem technology, which includes semiconductor technology, together with current design methods determine the user requirements of (mu) TCAD tools aimed at microsystem developers. The choice of numerical methods and computer technology complete the specification. In this paper we present a (mu) TCAD system, and show how it is broken up into tasks, individual programs that make up the functional building blocks. Many of these blocks already exist, organized within the (mu) TCAD system and centered around our microsystem simulation kernel SOLIDIS. We illustrate these functional blocks with concrete examples. We conclude by considering the missing links in the (mu) TCAD chain.

Paper Details

Date Published: 17 September 1996
PDF: 12 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250701
Show Author Affiliations
Jan G. Korvink, ETH Zuerich (Switzerland)
Henry Baltes, ETH Zuerich (Switzerland)


Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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