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Proceedings Paper

Micromachined rotating yaw-rate sensor
Author(s): Robert B. Yates; Connel B. Williams; Chris Shearwood; Phillip Mellor
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Paper Abstract

This paper describes a novel, electromagnetically levitated, micromachined gyroscope or yaw rate sensor. The device uses a rotor spun at high speed and has the potential for several orders of magnitude improvement in yaw rate sensitivity when compared to other micromachined sensors. The first prototype rotates at just over 1,000 revolutions per minute, with a predicted sensitivity of approximately 0.5 degrees per second. The model indicates that this rotation speed may be increased by orders of magnitude, with corresponding increases in the sensitivity, as the speed of rotation is only limited by the drag force in air. The device also has the advantage that it is extremely simple to fabricate.

Paper Details

Date Published: 17 September 1996
PDF: 8 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250700
Show Author Affiliations
Robert B. Yates, Univ. of Sheffield (United Kingdom)
Connel B. Williams, Univ. of Sheffield (United Kingdom)
Chris Shearwood, Univ. of Sheffield (United Kingdom)
Phillip Mellor, Univ. of Sheffield (United Kingdom)


Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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