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Proceedings Paper

Optimization of CMOS infrared detector microsystems
Author(s): Niklaus Schneeberger; Oliver Paul; Henry Baltes
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Paper Abstract

We report the fabrication and characterization of nine different infrared detector microsystems produced with two different commercial CMOS processes. They consist of micromachined thermoelectric sensors with on-chip signal conditioning circuitry. We developed a model for the performance of such microsystems based on numerical finite element analysis of the sensor and performance figures of the circuitry. The model was validated by comparing calculated and experimental sensor outputs. Deviations between modeled and measured performance were smaller than 21 percent. The usefulness of the model to optimize the layout of thermoelectric infrared sensors wit respect to overall system performance is demonstrated.

Paper Details

Date Published: 17 September 1996
PDF: 10 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250695
Show Author Affiliations
Niklaus Schneeberger, ETH Zuerich (Switzerland)
Oliver Paul, ETH Zuerich (Switzerland)
Henry Baltes, ETH Zuerich (Switzerland)


Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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