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In-depth analysis and research of additional components of the uncertainty budget using the finite element method
Author(s): Vladimir Skliarov
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Paper Abstract

The uncertainty of measurements is an important element of the measurement result. The component part of the uncertainty budget is the sensitivity coefficients included in the measurement equation that are the ratio of change in measurands to the change in each of the parameters included in the measurement equation. The use of software in the systems for measurement and modeling of measuring processes allows to take into account and analyze all possible factors of influence on the result of measurements, carry out model research, reject factors with minimal impact and vice versa, analyze in more detail those with maximum impact on expanded uncertainty.

The study of the national measurement standards allows to carry out experimental programs on their improvement and increasing the level of metrological services. The analysis of the influence of additional input quantities complicates the model equation but leads to in-depth study of the physical process. Calculations are made using the finite element method implemented in the academic version of the software package of engineering analysis.

The purpose of the work is to study the influence of additional sensitivity coefficients included in the uncertainty budget of the measurement result. In the example of modeling of the hardness measurement on the Rockwell and Super- Rockwell scales, an approach to refine the model equation based on the inclusion of additional input quantities is considered.

As a practical application, the proposed methodology is useful in evaluating the results of international comparisons. As a promising area for further research, there is an in-depth study of additional sensitivity coefficients when drawing-up the uncertainty budget on the Vickers and Brinell scales.

Paper Details

Date Published: 26 March 2019
PDF: 11 pages
Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109592U (26 March 2019); doi: 10.1117/12.2506859
Show Author Affiliations
Vladimir Skliarov, Institute of Metrology (Ukraine)
O.M. Beketov National Univ. of Urban Economy in Kharkiv (Ukraine)

Published in SPIE Proceedings Vol. 10959:
Metrology, Inspection, and Process Control for Microlithography XXXIII
Vladimir A. Ukraintsev; Ofer Adan, Editor(s)

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