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Three-dimensional shape measurement of specular object with discontinuous surfaces by direct phase measuring deflectometry
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Paper Abstract

Phase measuring deflectometry (PMD) has been widely studied to obtain three-dimensional (3D) shape of specular surfaces. Due to the procedure of slope integration, complicated specular components having discontinuous surfaces cannot be measured by the existing PMD methods. This paper presents a novel Direct PMD (DPMD) method to solve this problem of measuring discontinuous specular objects. A mathematical model is established to directly relate the absolute phase and depth data. Then a hardware measuring system has been set up. The system parameters are calibrated by using a plane mirror and a translating stage. 3D shape of an artificial specular step, a monolithic multi-mirror array having multiple specular surfaces and a reflected diamond distribution surface has been measured. The experimental results verified that the proposed method based on DPMD successfully measured full-field 3D shape of specular objects having discontinuous surfaces accurately and effectively.

Paper Details

Date Published: 13 May 2019
PDF: 14 pages
Proc. SPIE 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII, 109910A (13 May 2019); doi: 10.1117/12.2506786
Show Author Affiliations
Zonghua Zhang, Hebei Univ. of Technology (China)
Nan Gao, Hebei Univ. of Technology (China)
Xiaohong Liu, Hebei Univ. of Technology (China)


Published in SPIE Proceedings Vol. 10991:
Dimensional Optical Metrology and Inspection for Practical Applications VIII
Kevin G. Harding; Song Zhang, Editor(s)

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