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Integration of functional microstructures inside a microfluidic chip by direct femtosecond laser writing
Author(s): Zhijiang Hu; Liang Yang; Bing Xu; Chenchu Zhang; Hongmei Zhong; Chen Xin; Kai Hu; Hao Wu; Yanlei Hu; Dong Wu
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Paper Abstract

In the development of microfluidic systems, conventional 2D processing technologies are increasingly difficult to meet the requirement of integration of multifunctional components within a microchannel. Recently, two-photon polymerization (TPP) technology has emerged as a novel alternative to fabricate 3D microdevices functionalizing conventional microfluidic chips. Here, the development of TPP microfluidic technology comprising parallel fabrication, holographic patterning method and real-time lithography in a controlled flow is reported. And a series of functional microcomponents containing microfilters, microsorters, microtrap, tunable microlens are fabricated by above methods. The results indicate that the processing of microfluidic devices is simple, timesaving, low cost and programmable designability. The functional microchips are further used in blood cells sorting, biomedical sensing, microparticle purification and trapping with successful test results.

Paper Details

Date Published: 6 February 2019
PDF: 8 pages
Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 108420J (6 February 2019); doi: 10.1117/12.2506742
Show Author Affiliations
Zhijiang Hu, Univ. of Science and Technology of China (China)
Liang Yang, Univ. of Science and Technology of China (China)
Bing Xu, Univ. of Science and Technology of China (China)
Chenchu Zhang, Univ. of Science and Technology of China (China)
Hongmei Zhong, Univ. of Science and Technology of China (China)
Chen Xin, Univ. of Science and Technology of China (China)
Kai Hu, Univ. of Science and Technology of China (China)
Hao Wu, Univ. of Science and Technology of China (China)
Yanlei Hu, Univ. of Science and Technology of China (China)
Dong Wu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 10842:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology
Mingbo Pu; Xiong Li; Xiaoliang Ma; Rui Zhou; Xuanming Duan; Xiangang Luo, Editor(s)

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